A new article accepted on ACS Sensors

Our article "Magnetic Trampoline Resonators Made of (La,Sr)MnO3 Single-Crystal Thin Films" has been published on ACS Sensors!

 

Abstract: Microelectro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as a structural element for the resonator and a functional magnetic layer. Suspended trampolines are realized in a single-step process from LSMO thin films and show a quality factor of up to 60k and f·Q products reaching 1010 Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing a saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with a coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors.